Dow Electronic Materials Launches High-Performance KLEBOSOL® II 1730 Dilutable Colloidal Silica Slurry for CMP
New Particle Technology Reduces Defectivity by 50 Percent;
Increases Removal Rates by up to 10 Percent
Shanghai, China - March 20, 2012
Dow Electronic Materials
Dow Electronic Materials, a business unit of The Dow Chemical Company (NYSE:DOW), today announced volume availability of KLEBOSOL® II 1730 colloidal silica slurry for use in the chemical mechanical planarization (CMP) process. KLEBOSOL® II 1730 slurry has demonstrated a 50 percent improvement in defects when used for inter-layer dielectrics (ILD) and can increase removal rates by up to 10 percent when compared to previous generations of KLEBOSOL® II 1630. Ideal for ILD and post-metal buff applications, the new slurry increases tool uptime, reduces consumable costs and improves throughput for critical CMP process steps.
“Semiconductor manufacturers are continually looking to improve cost of ownership (COO) and performance to maintain the pace of Moore’s Law,” said Mario Stanghellini, Global Marketing Director for Dow Semiconductor Technologies. “Dow is committed to bringing deep materials science and nano-particle expertise that enables the development of advanced slurry products to meet next-generation process targets for CMP.”
KLEBOSOL® II 1730 slurry features a unique new elongated abrasive particle morphology that improves slurry utilization since it is dilutable with lower point-of-use (POU) solids, making it highly cost-effective. It offers comparable planarization efficiency to fumed silica slurries and high removal rates that increase throughput to reduce overall cost of ownership, especially when combined with Dow’s process control capabilities. Additional savings can be achieved when combined with the long pad-life of Dow’s CMP pads, which can be further extended through the need for much less aggressive conditioning. KLEBOSOL® II 1730 is easy to handle, with no agglomeration and accepts 0.3 μm POU filtration capability to further minimize defectivity.
Dow (NYSE: DOW) combines the power of science and technology to passionately innovate what is essential to human progress. The Company is driving innovations that extract value from the intersection of chemical, physical and biological sciences to help address many of the world's most challenging problems such as the need for clean water, clean energy generation and conservation, and increasing agricultural productivity. Dow's integrated, market-driven, industry-leading portfolio of specialty chemical, advanced materials, agrosciences and plastics businesses delivers a broad range of technology-based products and solutions to customers in approximately 180 countries and in high-growth sectors such as packaging, electronics, water, coatings and agriculture. In 2014, Dow had annual sales of more than $58 billion and employed approximately 53,000 people worldwide. The Company's more than 6,000 products are manufactured at 201 sites in 35 countries across the globe. References to "Dow" or the "Company" mean The Dow Chemical Company and its consolidated subsidiaries unless otherwise expressly noted. More information about Dow can be found at www.dow.com.
About Dow Electronic Materials
Dow Electronic Materials, a global supplier of materials and technologies to the electronics industry, brings innovative leadership to the semiconductor, interconnect, finishing, photovoltaic, display, LED and optics markets. From advanced technology centers worldwide, teams of talented Dow research scientists and application experts work closely with customers, providing solutions, products and technical service necessary for next-generation electronics. These partnerships energize Dow's power to invent. Its key end-use applications include a broad range of consumer electronics from personal computers, to television monitors, cellular phones, global positioning systems, automobile safety systems, and avionics.
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